Microoptomechanical systems

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Microoptomechanical systems (MOMS), also written as micro-optomechanical systems, are a special class of microelectromechanical systems (MEMS) which use optical and mechanical, but not electronic components.^[1]

• Microoptoelectromechanical systems (MOEMS)
• Nanoelectromechanical systems (NEMS)

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