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MKS Instruments

MKS Inc. is a technology company that supplies instruments, subsystems, systems, process control technologies, and specialty chemical products used in manufacturing semiconductor chips, printed circuit board, advanced packaging (semiconductor), and specialty industrial applications. The company also provides chemicals and equipment used for creating decorative and functional surface finishes. The company is headquartered in Andover, Massachusetts with offices and facilities worldwide.

MKS was founded in 1961 by engineers Ken Harrison and John A. Dillon. Both co-founders contributed to the company's first product, the Baratron® capacitance manometer, which measures gas pressure within a semiconductor wafer fabrication chamber.

The 1990s saw substantial growth in the semiconductor industry due to the development of more powerful microprocessors and integrated circuits and the adoption of personal computing by consumers and businesses worldwide. MKS capitalized on the demand with advancements in vacuum measurement and control, gas and vapor delivery, and process monitoring solutions. The company expanded its global presence by establishing new sales and service offices worldwide to better serve an international customer base and tap into emerging markets in Europe and Asia.

In 1999, the company undertook an initial public offering (IPO). MKS went public on the NASDAQ stock exchange.

In 2000, MKS acquired California-based Spectra International, LLC, a designer and manufacturer of mass spectrometer and optical spectrometer-based process monitoring products used in the semiconductor, thin film coatings and advanced materials processing industries, for $9.7 million in cash.

In 2001, MKS acquired Applied Science and Technology Inc.(ASTeX), a supplier of sputtering equipment and other products, for $300 million in stock.

In 2002,  MKS acquired Emerson Electric Company’s ENI Division, a supplier of solid-state radio frequency (RF) and direct current (DC) plasma power supplies, matching networks and instrumentation for $288 million in stock.

Umetrics, a privately held Swedish supplier of multivariate data analysis and design of experiments software, was purchased by MKS in 2008.

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